Micro Assembly & Micro Dispensing: ONYX500 Production Cell

ONYX520 Production Cell
High Precision, High Volume Micro Assembly, Dispensing & Eutectic Bonding

The ONYX520 Production Cell is the ultimate precision, multifunctional system with a wide range of applications including:

Semiconductors
Micro Dispensing, Die Attachment, Wafer Handling
Photonics
Assembly, Dispensing, Alignment, Curing, Inspection
Micro-Mechanics
Micro Assembly, Component Packaging, Kitting/Sorting
Electronics
Assembly, Dispensing, Inspection, Repair

ONYX500 Benchtop version also available.

Micro Assembly

Micro Dispensing

MEMS Kitting & Sorting

Features/Benefits:
Cartesian Positioning with Precision Linear Motors
& Encoders 1 micron resolution

Distributed Closed-Loop Motion Control

Assembly Head with 5-Tool Toolchanger

Dual Camera Vision System
Up looking camera compares component/die/object mounted on z-axis vacuum nozzle to a model. Down looking camera compares substrate/object on the application plate to a model.

Precision Force-Controlled Placement
The component/die/object is automatically placed after the two part vision match. Various precision force placement systems are available to provide the minimum (1 grams) or maximum (20 kilograms) force required.

High Performance Integrated Dispensing
Up to 3 dispenser systems: Time/pressure, auger pump and 2 part mixing pump

Automatic Tool Changer
Provides the capability to store and automatically change up to twelve vacuum nozzles.

Optional Wafer Ejectors, Die Flipper, Eutectic Oven
and 2" & 4" Waffle Trays

	Flexible Design Allows machine to be configured based on application requirements Custom application plate shown below.


	Technical Data